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Production of carbon nanotubes by PECVD and their applications to supercapacitors

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dc.contributor Bertrán Serra, Enric
dc.contributor Jover, Eric
dc.creator Caglar, Burak
dc.date 2010-02-10T14:23:17Z
dc.date 2010-02-10T14:23:17Z
dc.date 2010-02-10T14:23:17Z
dc.date.accessioned 2024-12-16T10:14:56Z
dc.date.available 2024-12-16T10:14:56Z
dc.identifier http://hdl.handle.net/2445/11122
dc.identifier.uri http://fima-docencia.ub.edu:8080/xmlui/handle/123456789/2811
dc.description Màster en Nanociència i Nanotecnologia
dc.description Plasma enhanced chemical vapor deposition (PECVD) is a versatile technique to obtain vertically dense-aligned carbon nanotubes (CNTs) at lower temperatures than chemical vapor deposition (CVD). In this work, we used magnetron sputtering to deposit iron layer as a catalyst on silicon wafers. After that, radio frequency (rf) assisted PECVD reactor was used to grow CNTs. They were treated with water plasma and finally covered by MnO2 as dielectric layer in order to use CNTs as electrode for supercapacitors. Optimization of annealing time, reaction time and temperature, water plasma time and MnO2 deposition time were performed to find appropriate conditions to improve the characteristics of supercapacitors. SEM (Scanning Electron Microscopy), TEM (Transmission Electron Microscopy), AFM (Atomic Force Microscopy) and Raman spectroscopy were used to characterize obtained electrodes.
dc.format 16 p.
dc.format application/pdf
dc.language eng
dc.rights cc-by-nc-nd (c) Caglar, 2010
dc.rights http://creativecommons.org/licenses/by/3.0/es/
dc.rights info:eu-repo/semantics/openAccess
dc.source Màster Oficial - Nanociència i Nanotecnologia
dc.subject Materials nanoestructurats
dc.subject Carboni
dc.subject Deposició en fase de vapor
dc.subject Treballs de fi de màster
dc.subject Supercondensadors
dc.subject Nanostructured materials
dc.subject Carbon
dc.subject Vapor-plating
dc.subject Supercapacitors
dc.subject Master's theses
dc.title Production of carbon nanotubes by PECVD and their applications to supercapacitors
dc.type info:eu-repo/semantics/masterThesis


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