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Design, fabrication and characterization of Si nanopillars-based photonic crystal for mechanical sensing

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dc.contributor Romano Rodríguez, Albert
dc.creator López Aymerich, Elena
dc.date 2018-12-17T13:02:37Z
dc.date 2018-12-17T13:02:37Z
dc.date 2018-11
dc.date.accessioned 2024-12-16T10:27:11Z
dc.date.available 2024-12-16T10:27:11Z
dc.identifier http://hdl.handle.net/2445/127014
dc.identifier.uri http://fima-docencia.ub.edu:8080/xmlui/handle/123456789/22013
dc.description Màster en Nanociència i Nanotecnologia, Facultat de Física, Universitat de Barcelona, Curs: 2017-2018. Tutor: Albert Romano Rodríguez
dc.description In this work the first results of the experimental implementation of silicon nanopillars hexagonal arrays acting as photonic crystals with the aim of their use as force sensors are presented. The starting point are two previous bachelor and master thesis that have shown the theoretical potentialities of such a structure acting as a photonic crystal and as a mechanical sensor due to deflection of the nanopillars. Here we present the optimization of the fabrication procedure of these nanostructures, based on a sequence of complex processes carried out in Clean-Room environment, and the support of simulations and morphological analysis via Scanning Electron Microscopy and the results obtained from Fourier Transform Infra-Red spectroscopy characterisation match the simulations of the photonic crystal, with bandgaps in the near infrared range, and pave the way in the use of such structures for mechanical testing in biomedical applications.
dc.format 8 p.
dc.format application/pdf
dc.language eng
dc.rights cc-by-nc-nd (c) López Aymerich, 2018
dc.rights http://creativecommons.org/licenses/by-nc-nd/3.0/es/
dc.rights info:eu-repo/semantics/openAccess
dc.source Màster Oficial - Nanociència i Nanotecnologia
dc.subject Nanoelectrònica
dc.subject Silici
dc.subject Treballs de fi de màster
dc.subject Nanoelectronics
dc.subject Silicon
dc.subject Master's theses
dc.title Design, fabrication and characterization of Si nanopillars-based photonic crystal for mechanical sensing
dc.type info:eu-repo/semantics/masterThesis


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